??? CVD ????

I.          PlanarGROW  ???CVD????

     planarGROW ?????????????(thermal CVD)????????????????????????????????????????

     ???????planarGROW-2B, planarGROW-4S??planarGROW-6E ?????????????????????????????????

     ???

   *????????????

    planargrow-4S ????

          planarGROW ????????????????????????(GUI)??????????????LabVIEW ????????????????

          ?????????????????????????????????????�???� ??????????????????????????

          ? ?????????????turbopump ????

                                                       Fully Automated PC Control with LabVIEW Front End

                                                                            User-configurable Auto Process Settings

????????????????                                                                                   

????15?????????????????planarGROW ??????????????????????????????????????

?????? �References�??????????�Installations�?????????????????                                                                                         

?? 2D??CVD ????

II.          PlanarGROW  h-BN CVD ??

    planarGROW ??????(h-BN )???????(thermal CVD)??????????????????????2?????(planarGROW-2S

    -BN)?????????????????????????????????h-BN?????????(liquid borazine) ??????(solid 

    ammonia borane)??????????????????(precursor)?????????????(h-BN )????(graphene)??????

PlanarGROW-2S-BN ????

Quartz Tube & Furnace

- Tube Dimensions: 2� (?50*1000mm)

- Heater: Kanthal Wire w/ Glass Wool Molding

- Maximum Temperature: 1,100�C

- Heating Zone: 1-zone, ?100*350mm

- Linear Motion Control Unit

Gas Supply Unit

- Four (4) Celerity TN2900 Mass Flow Controllers

   * Hydrogen (H2), 100sccm

   * Methane (CH4), 200sccm [For Graphene]

   * Argon (Ar): 1,000sccm

   * Nitrogen (N2): 1,000sccm 

- Source Vapor Feeding System w/ Heating Jacket

- Low Temp. Chiller (-10�C) for Borazine Canister

????????????

?????????

????????????????????????????2D??????????? (BN)???????????planarTECH????????

???????planarGROW-2S-BN ????????????DongGuk??Ki Kang Kim??????????????Ki Kang Kim???????

??????????(BN)?????????planarGROW (???)???????

???? (Growth on Copper)

1. (2013-02-15) Kim, S.M., et al. �Synthesis of Patched or Stacked Graphene and hBN Flakes: A Route to Hybrid Structure Discovery,� Nano Lett., 2013, 13 (3), pp 933�94 | DOI:10.1021/nl303760m

2. (2012-09-12) Kim, K.K., et al. �Synthesis and Characterization of Hexagonal Boron Nitride Film as a Dielectric Layer for Graphene Devices,� ACS Nano, 2012, 6 (10), pp 8583�8590 | DOI:10.1021/nn301675f

3. (2011-11-23) Kim, K.K., et al. �Synthesis of Monolayer Hexagonal Boron Nitride on Cu Foil Using Chemical Vapor Deposition,� Nano Lett., 2012, 12 (1), pp 161�166 | DOI:10.1021/nl203249