mPT200/300??????????????????(end effectors)???8�/12�?????????
????
??????: 8/12� (?6�/8�)
??????: ??, ??, ??, eWLB, Taiko?MEMS
??????????????
??6????????????????
????8?????????????????
??????(end effectors)
??????????
???????? (mapping sensor)
??8"?12"?????
??SECS/GEM?????
?CE ??
??SEMI ??
????:
????????:
II. ?????? mWL 200/300 (150/200)
mWL200/300???????????????????????8�/12�??????????????(FOUP/ FOSB)?????????????????????????????????
????:
??????: 8�/12� (?6�/8�)
??????: ??, ??, ??, eWLB, Taiko?MEMS
????????
??????????????
??????????
??????(end effectors)
??????????
???????? (mapping sensor)
??8"?12"?????
??SECS/GEM?????
?CE ??
??SEMI ??
????:
TAIKO??????:
III. ?????? mRR 300 (200)
mRR???????????????12� TAIKO?????????????????????
????:
- ??????: 12� (?8�)
- ??????60??/???
- ??????????????
- ?????????
- ??????????
- ??????????
- ??SECS/GEM?????
- ?CE ??
- ??SEMI ??
????:
??????:
IV. ?????? mWS 200/300 (150/200)
mWS200/300?????? ???8�/12�????????????????????????FOUP?????????????
mWS200/300??????FOUP/?????????????????(pre-aligner)???????????????????FOUP/?????
????:
??????: 8�/12� (?6�/8�)
??????: ??, ??, ??, eWLB, Taiko?MEMS
??????????????
???????????????
??????????
????????
??????(end effectors)
????????(mapping sensor)
??8"/12" (?6�/8�)?????
??SECS/GEM?????
?CE ??
??SEMI ??
????:
?????
??(end effectors):
I. ?????????
??????? ?? (mBV??)?????????????????????: ???????????????????
???????????:
??:
?????????????????????????????????????????????????????(CDA)??????????????????????????????????????????
??:
II.?????
?????
(mCL??)??????????????????????????????????: ?????????????
???????????:
6� (mCL 150)
8� (mCL 200)
12� (mCL 300)
??:
mCL????????????????(?????)??????????????0.2~0.3mm????????PEEK?????????????????????????????????????????????
??
- ??????: 6"?8�?12�
- ???????? > 50 um (2 mil)
- ?????? (??12 mm?? )
- ??????????
- ????????????????????
- ??????????????
- ???????
- ??????mechatronic?????????
- ?????
