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二維材料CVD系統
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h-BN六方氮化硼CVD系統3
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h-BN六方氮化硼CVD系統

用於合成h-BN的planarGROW高溫CVD系統是一水平式爐管加熱反應器。h-BN可以從液體環硼氮烷(liquid borazine)或固體氨(solid ammonia borane),該系統同時支援此兩種前驅體,此外,該系統還可同時支援石墨烯的製程使用,亦可依客戶的具體應用要求進行客製。

規格與說明

planarGROW-2S-BN CVD系統規格

QUARTZ TUBE & FURNACE
  • Tube Dimensions: ф50*1000mm
  • Furnace Body (WxHxD): 500x500x650L
  • Heater: Kanthal Wire w/ Glass Wool Molding
  • Maximum Temperature: 1,100°C
  • Thermocouple: K type, ID 6.5 mm
  • Heating Zone: 1-zone, ф100*350mm
  • Linear Motion Control Unit
  • Manual Furnace Door
planarGROW-1B-BN with Touch Screen
GAS SUPPLY UNIT
  • Four (4) Celerity TN2900 Mass Flow Controllers
    • Hydrogen (H2), 100sccm
    • Methane (CH4), 200sccm [For Graphene]
    • Argon (Ar): 1,000sccm
    • Nitrogen (N2): 1,000sccm Open Mounting Bay for Fifth (5th) MFC
  • ¼” 316L Stainless Steel Tubing/Fittings
  • Five (5) ¼” Pneumatic-Type Diaphragm Valves
  • Source Vapor Feeding System w/ Heating Jacket
  • Low Temp. Chiller (-10°C) for Borazine Canister
Fully Automated PC Control with LabVIEW Front End

VACUUM & PRESSURE CONTROL UNIT

  • Varian Dry Pump (110 liter/min)
  • KF25 2-step Pneumatic Roughing Valve
  • ¼” Manual Vent Valve
  • ¼” Metering Bypass Valve

SYSTEM CONTROL UNIT

  • MS Windows XP Pro Embedded PC
    • Intel 3.0Ghz Core2Duo, 2GB Memory
  • PLC Module with National Inst. LabVIEW Interface
  • Samsung E1920R 19” LCD Monitor

SAFETY & COOLING

  • Water Cooled End Flanges w/ Viewport
  • SU304 50mm ID Vacuum Plugs
  • Aluminum Seal Bushes w/ Kalrez O-Rings
  • Cold Trap With Liquid Nitrogen Basket
  • Buzzer Alarm & System Error Display
  • Interlock System

DIMENSIONS & UTILITY REQUIREMENTS

  • Footprint: 1.75m (W) x 1.60m (H) x 0.75m (D)
  • Weight:  ~200kg
  • Power: 220V, 50/60Hz, 3Φ, 4-wire, 30A
  • Air: 4-5kgf/cm2, ¼” tube
  • Water: 2-3kgf/cm2, ½” tube
Low-temperature Chiller for Borazine Canister


六方氮化硼 六角硼氮 白石墨烯 二維材料 半導體 高導電 電晶體 h-BN planarGROW planarTECH

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