QUARTZ TUBE & FURNACE
- Tube Dimensions: ф50*1000mm
- Furnace Body (WxHxD): 500x500x650L
- Heater: Kanthal Wire w/ Glass Wool Molding
- Maximum Temperature: 1,100°C
- Thermocouple: K type, ID 6.5 mm
- Heating Zone: 1-zone, ф100*350mm
- Linear Motion Control Unit
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planarGROW-1B-BN with Touch Screen |
GAS SUPPLY UNIT
- Four (4) Celerity TN2900 Mass Flow Controllers
- Hydrogen (H2), 100sccm
- Methane (CH4), 200sccm [For Graphene]
- Argon (Ar): 1,000sccm
- Nitrogen (N2): 1,000sccm Open Mounting Bay for Fifth (5th) MFC
- ¼” 316L Stainless Steel Tubing/Fittings
- Five (5) ¼” Pneumatic-Type Diaphragm Valves
- Source Vapor Feeding System w/ Heating Jacket
- Low Temp. Chiller (-10°C) for Borazine Canister
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Fully Automated PC Control with LabVIEW Front End |
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VACUUM & PRESSURE CONTROL UNIT
- Varian Dry Pump (110 liter/min)
- KF25 2-step Pneumatic Roughing Valve
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SYSTEM CONTROL UNIT
- MS Windows XP Pro Embedded PC
- Intel 3.0Ghz Core2Duo, 2GB Memory
- PLC Module with National Inst. LabVIEW Interface
- Samsung E1920R 19” LCD Monitor
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SAFETY & COOLING
- Water Cooled End Flanges w/ Viewport
- SU304 50mm ID Vacuum Plugs
- Aluminum Seal Bushes w/ Kalrez O-Rings
- Cold Trap With Liquid Nitrogen Basket
- Buzzer Alarm & System Error Display
DIMENSIONS & UTILITY REQUIREMENTS
- Footprint: 1.75m (W) x 1.60m (H) x 0.75m (D)
- Power: 220V, 50/60Hz, 3Φ, 4-wire, 30A
- Water: 2-3kgf/cm2, ½” tube
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Low-temperature Chiller for Borazine Canister |