planarGROW-2S-BN CVD系統規格
QUARTZ TUBE & FURNACE
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planarGROW-1B-BN with Touch Screen |
GAS SUPPLY UNIT
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Fully Automated PC Control with LabVIEW Front End |
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VACUUM & PRESSURE CONTROL UNIT
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SYSTEM CONTROL UNIT
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SAFETY & COOLING
DIMENSIONS & UTILITY REQUIREMENTS
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Low-temperature Chiller for Borazine Canister |
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