ALE/1C UV-LED Exposure Systems to Replace Conventional 1 kW Lamp Houses

Primelite’s UV-LED Exposure System Advanced Light Engine ONE C (ALE/1C) is a powerful spot light source for driving many high-performance industrial UV exposure tools. Typically these are semi-automated and automated mask aligners for 6″ (150 mm) and 8″ (200 mm) wafers or broadband wafer stepper systems (1X steppers / mini steppers). Featuring UV-LED technology, it outperforms conventional high-pressure mercury discharge lamps with excellent output stability and flexible spectrum control. It also consumes less power, does not generate as much heat, lasts longer, and requires minimal overall maintenance.

At Primelite, we have embraced the principle of building products to serve as a versatile platform. ALE/1C UV-LED Exposure Systems are no exception – they let you combine up to three UV LEDs in the optical path. In most cases, these are i-line (CWL 365 nm), h-line (CWL 405 nm), and g-line (CWL 436 nm) emitters with illumination power exceeding that of conventional 1-kW mercury discharge lamps.


Highlights:

• Built-in solution for maximum exposure efficiency and performance
• Up to 50 watts of broadband exposure (350 - 450 nm)
• Closed-loop controlled optical output for maximum process stability
• No mercury! Safe and future-proof LED light source
• UV-LED technology for longer life and lower TCO
• Premium, made-in-Germany quality

Spectrum	Angular Distribution (from Light Pipe)