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Solarius｜3D Surface Inspection

Customized System

AOP Thickness

AOP Thickness

A state of the art DUAL SENSOR TTV metrology for SIMULTANEOUS dual side geometry measurements

Specifications and Description

watch AOP Thickness video

The AOP-Thickness platform is equipped with a high precision XY stage with a measurement range up to 400 mm x 400 mm. Two high speed line or point sensors enable height measuring ranges between 2 mm and 145 mm with vertical resolutions of 0.2 µm up to 5 µm. Solarius SolarScan software provides automation features as well as customized recipes. The modular system design offers the highest flexibility for customized analysis tools.

Fast and accurate thickness measurement
Modular design
High throughput by a large measurement area
Flexible and easy to automate
Customized user interface
Customized data analysis
Non-contact and non-destructive

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