watch Matrix 3000 video


The Matrix 3000 is an example of the Solarius advanced integration technology at work. It is a fully customized system that facilitates multiple sensor and motion control configurations. Combined with our SolarScan and SolarCore software platforms, it provides most performant customer specific solutions.

The Matrix 3000 system consists of 3 high speed interferometers that measure samples in less than 260 milli-seconds with a repeatability of 100 nm. The measurement sequence also includes two 12-megapixel cameras supported by collimated telecentric light sources, data acquisition of the vision platform is better than 200 milli-seconds.

The complex motion control component of the system marries nano-precision linear actuators, fast stepper stages and high precision vacuum injectors. In all, 9 precision axes working in unison, utilizing pick and place technology and precision positioning to move samples through the 2-station measurement sequence.