| Solarius' highly experienced software team excels in rapidly capturing 3D surface image data, transforming it into reliable dimensional parameters, and visualizing 3D geometries. They provide fast and accurate results conforming to international standards such as ISO 4287 and ISO 25178, covering everything from simple Cartesian coordinate micron-level lengths and geometric shapes to nanoscale roughness, flatness, and complex surface parameters. |
| Geometry | Step Height/Depth |
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| Roughness | Flatness/Coplanarity |
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| Defects/Scratches/Cracks | Critical Dimension |
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| Via | TTV |
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| ROA | Bumping |
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