Highest Safety in Wafer Transfer
Wafers are getting thinner with advances in manufacturing processes, making it necessary to place very thin and often strongly distorted wafers on inspection systems or other post-process stages. Wafer loaders from mechatronic can load ultra-thin wafers with a thinness of as little as 50μm (micron) and the highest levels of safety and reliability that exceed all of the demands of the semiconductor industry. mechatronic mWL series wafer loaders offer the capabilities that reduce wafer transfer time significantly compared with conventional equipment. Wafer loaders from mechatronic systemtechnik help companies to optimize yield.


Applications:

• loading / unloading on a chuck
• wafer handling automation (e.g. for process, inspection, metrology tools etc.)

• optimized footprint
• handling of warped wafers
• Cleanroom class ISO class 5
• CE certificated
• SEMI standards compliant