The Wafer Loader mWL 200/300 is designed for fully automated loading and unloading of 200/300 mm (8”/12”) standard wafers and e.g. eWLB wafers from FOUPs/FOSBs onto a customized chuck. The adaptation to OEM tools according to customer requirements is possible.
Highest Safety in Wafer Transfer
Wafers are getting thinner with advances in manufacturing processes, making it necessary to place very thin and often strongly distorted wafers on inspection systems or other post-process stages. Wafer loaders from mechatronic can load ultra-thin wafers with a thinness of as little as 50μm (micron) and the highest levels of safety and reliability that exceed all of the demands of the semiconductor industry. mechatronic mWL series wafer loaders offer the capabilities that reduce wafer transfer time significantly compared with conventional equipment. Wafer loaders from mechatronic systemtechnik help companies to optimize yield.
Applications:
版權所有 © 展締科技股份有限公司. All Rights Reserved.
