The Wafer Sorter mWS 150/200 is designed for sorting 150/200 mm (6”/8”) wafers and can be equipped with up to six cassettes. The mWS 150/200 monitors all wafers in the cassette before and during the whole work process and verifies wafer and end-effector compatibility.
Economic Inventory and Material Flow Management
Automated wafer transfer tools are critical to any wafer fabrication or material handling facility as they eliminate the manual handling of wafers and allow fab operators both to track each wafer throughout the manufacturing process and to completely eliminate any risk of damage and particle contamination. Wafer sorters are essential for economic inventory and material flow management in the modern semiconductor industry.The mechatronic mWS series represents the latest generation of wafer sorters and sets new standards in safe handling of thin, ultra-thin or warped wafers. Consistent implementation of mechatronic´s modular design concept guarantees full compatibility with the widest variety of wafer carriers.The mechatronic mWS series of wafer sorting systems can automatically sort, split, merge and transfer wafers from any plastic or metal, transport or process cassette to any other cassette in a multiple carrier station – regardless of the number of cassette slots.
Applications
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