The Wafer Sorter mWS 200/300t is designed for sorting 200/300 mm (8”/12”) wafers and can be equipped with up to four cassettes or FOUPs (mixed loading possible). The mWS 200/300t handles wafers out of a cassette / FOUP onto a pre-aligner, forward onto a visual inspection unit and back into a cassette / FOUP
Economic Inventory and Material Flow Management
Automated wafer transfer tools are critical to any wafer fabrication or material handling facility as they eliminate the manual handling of wafers and allow fab operators both to track each wafer throughout the manufacturing process and to completely eliminate any risk of damage and particle contamination. Wafer sorters are essential for economic inventory and material flow management in the modern semiconductor industry.
The mechatronic mWS series represents the latest generation of wafer sorters and sets new standards in safe handling of thin, ultra-thin or warped wafers. Consistent implementation of mechatronic´s modular design concept guarantees full compatibility with the widest variety of wafer carriers.
The mechatronic mWS series of wafer sorting systems can automatically sort, split, merge and transfer wafers from any plastic or metal, transport or process cassette to any other cassette in a multiple carrier station – regardless of the number of cassette slots.
Applications:
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